Nitride semiconductor laser element
AssigneeNichia Corporation
InventorsTomonori Morizumi, Teruyuki Morito
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AssigneeNichia Corporation
InventorsTomonori Morizumi, Teruyuki Morito
Estimating the term…
A nitride semiconductor laser element includes a nitride semiconductor stack body and a protective film. The nitride semiconductor stack body includes first and second nitride semiconductor layers and an active layer disposed between the first nitride semiconductor layer and the second nitride semiconductor layer. The nitride semiconductor stack body defines a light-emission-side end face intersecting a face of the active layer on a second nitride semiconductor layer side, and a light-reflection-side end face intersecting the face of the active layer on the second nitride semiconductor layer side. The protective film is disposed on the light-emission-side end face of the nitride semiconductor stack body. The protective film includes, in the order from the light-emission-side end face, a first film that is a crystalline film containing oxygen and aluminum and/or gallium, a second film that is a nitride crystalline film, and a third film containing aluminum and oxygen.
A nitride semiconductor laser element comprising:
A nitride semiconductor laser element comprising:
Dependencies are inferred from the claim text.