Back to results
US 12,719,142 B2Granted
Wideband TEM to TM01 mode converter for microwave plasma systems
AssigneeApplied Materials, Inc.
InventorsXiaokang Yang, Tza-Jing Gung, John C. Forster, Sanjeev Baluja
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to an apparatus that includes a dielectric puck with a height between a first surface and a second surface. In an embodiment, the apparatus further includes a pin that is inserted into a hole into the first surface of the dielectric puck, where the pin is electrically conductive. In an embodiment, the pin includes a first portion with a first width, and a second portion with a second width. In an embodiment, the second width is greater than the first width.
Claims22
An apparatus, comprising:
- a dielectric puck with a height between a first surface and a second surface;
- and
- a pin inserted into a hole into the first surface of the dielectric puck, wherein the pin is electrically conductive, wherein the pin is electrically coupled to an impedance transformer, and wherein the pin comprises:
- a first portion with a first width;
- and
- a second portion with a second width, wherein the second width is greater than the first width.
3 more elements
An apparatus, comprising:
- a chamber with a lid, wherein the lid comprises a first dielectric material;
- a puck on the lid, wherein the puck comprises a second dielectric material;
- a conductive layer around the puck;
- and
- a pin inserted into a hole in the puck, wherein the hole has a first width at a surface of the puck, wherein the pin has an end with a second width that is greater than the first width, and wherein a pin depth into the puck is less than half of a height of the puck.
2 more elements
An apparatus, comprising:
- a plate, wherein the plate comprises a first dielectric material;
- a puck over the plate, wherein the puck comprises a second dielectric material;
- a hole into the puck, wherein the hole has a first width at a surface of the puck and a second width within the puck, wherein the second width is greater than the first width;
- and
- a pin inserted into the hole, wherein a pin depth is less than half of a height of the puck.
2 more elements
An apparatus, comprising:
- a chamber with a lid, wherein the lid comprises a first dielectric material;
- a puck on the lid, wherein the puck comprises a second dielectric material;
- a conductive layer around the puck;
- and
- a pin inserted into a hole in the puck, wherein the pin is electrically coupled to an impedance transformer and a microwave power amplifier, and wherein the hole has a first width at a surface of the puck and wherein the pin has an end with a second width that is greater than the first width.
2 more elements
An apparatus, comprising:
- a dielectric puck with a height between a first surface and a second surface;
- and
- a pin inserted into a hole into the first surface of the dielectric puck, wherein the pin is electrically conductive, and wherein the pin comprises:
- a first portion with a first width;
- and
- a second portion with a second width, wherein the second width is greater than the first width, and wherein the first surface of the dielectric puck is tapered.
3 more elements
An apparatus, comprising:
- a dielectric puck with a height between a first surface and a second surface;
- and
- a pin inserted into a hole into the first surface of the dielectric puck, wherein the pin is electrically conductive, and wherein the pin comprises:
- a first portion with a first width;
- and
- a second portion with a second width, wherein the second width is greater than the first width, wherein the second portion has a cross-sectional shape with tapered sidewalls, wherein the pin further comprises a third portion that is separated from the first portion by the second portion, and wherein the third portion has a uniform width through an entire length of the third portion.
3 more elements
An apparatus, comprising:
- a dielectric puck with a height between a first surface and a second surface;
- and
- a pin inserted into a hole into the first surface of the dielectric puck, wherein the pin is electrically conductive, and wherein the pin comprises:
- a first portion with a first width;
- and
- a second portion with a second width, wherein the second width is greater than the first width, wherein the second portion comprises a stepped cross-sectional shape, and wherein the first surface of the dielectric puck has a stepped profile.
3 more elements
Dependencies are inferred from the claim text.