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US 12,719,024 B2Granted
Plasma apparatus and methods for processing feed material utilizing an upstream swirl module and composite gas flows
Assignee6K Inc.
InventorsMichael C. Kozlowski, Michael Resnick, Pawel Matys
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Abstract
Disclosed herein are systems, methods, and devices processing feed material utilizing an upstream swirl module and composite gas flows. Some embodiments are directed to a microwave plasma apparatus for processing a material, comprising: a first flow module, a second flow module, and a liner.
Claims19
A microwave plasma apparatus for processing a material, comprising:
- a first swirl module, a second swirl module downstream of the first swirl module, a waveguide downstream of the first swirl module and the second swirl module, and a liner;
- the first swirl module in communication with the second swirl module, the first swirl module comprising a plurality of first gas inlets, the plurality of first gas inlets configured to generate a first swirl gas flow towards the second swirl module;
- and
- the second swirl module comprising a plurality of second gas inlets, the plurality of second gas inlets configured to generate a second swirl gas flow towards the liner,
- wherein the first swirl module and the second swirl module are configured such that the first swirl gas flow and the second swirl gas flow are combined into a composite gas flow prior to entering the liner.
2 more elements
Dependencies are inferred from the claim text.