Back to results
US 12,719,021 B2Granted
Smart dynamic load simulator for RF power delivery control system
AssigneeApplied Materials, Inc.
InventorsJie Yu, Yue Guo, Kartik Ramaswamy, Tao Zhang, Shahid Rauf, John Forster, Sidharth Bhatia, Rong Gang Zheng
Life of this patent
Estimating the term…
Abstract
Embodiments disclosed herein include a dynamic load simulator. In an embodiment, the dynamic load simulator comprises an impedance load, a reverse match network, and a smart RF controller. In an embodiment, the smart RF controller comprises a dynamic load generator, and a reverse match controller.
Claims15
A dynamic load simulator, comprising:
- an impedance load;
- a reverse match network;
- and
- a smart RF controller, wherein the smart RF controller comprises:
- a dynamic load generator;
- and
- a reverse match controller, wherein the dynamic load generator is configured to generate a load impedance output based on an input comprising the impedance load, and wherein the reverse match controller is configured to ensure a fidelity of the load impedance output generated by the dynamic load generator.
4 more elements
A smart RF controller, comprising:
- a dynamic load generator configured to provide a load impedance trace on a reverse match network that is coupled to a dummy load;
- and
- a reverse match controller, wherein the dynamic load generator is configured to generate a load impedance output based on an input comprising the impedance load, and wherein the reverse match controller is configured to ensure a fidelity of the load impedance output generated by the dynamic load generator.
Dependencies are inferred from the claim text.