Back to results
US 12,719,012 B2Granted
Method of sample preparation and analysis
AssigneeFEI Company
InventorsMichal Valík, Petr Malek, John Mitchels, František Vaške, Veronika Vrbovská, Miloš Hovorka
Life of this patent
Estimating the term…
Abstract
The present invention provides a method of sample preparation and analysis and a sample holder that may be used in said method.
Claims10
A sample holder for carrying a sample to be irradiated with an electron beam, which sample holder comprises a sample receiving area and an outer edge, characterised in that the outer edge of the holder comprises at least one orientation element, wherein the at least one orientation element is configured to be received by a loading cassette or stage holder,
- wherein the outer edge further comprises a protrusion for holding a sample, characterised in that the outer edge comprising the protrusion slopes away from the protrusion.
Dependencies are inferred from the claim text.