Capacitor, electronic device including the same, and method of manufacturing the same

A method of manufacturing a capacitor, the method comprising:

• forming one of a first thin-film electrode layer or a second thin-film electrode layer;
• epitaxially growing an interlayer, including an anionized layer, on one surface of the one of the first thin-film electrode layer or the second thin-film electrode layer;
• arranging a dielectric layer, including a binary metal oxide, on the interlayer;
• and
• arranging a remainder one of the first thin-film electrode layer or the second thin-film electrode layer on the dielectric layer
• wherein the interlayer has a same type of a crystal structure as and a different composition from the dielectric layer, and
• the anionized layer includes at least one of a monovalent cation, a divalent cation, or a trivalent cation, and
• the anionized layer has an unbalanced charge such that a total charge of the anionized layer is negative.