Light source apparatus, lithography apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsMahiro Saito, Mizuma Murakami
Life of this patent
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Abstract
A light source apparatus includes a light source, a first housing configured to store the light source, a planar surface of the first housing including a plurality of openings communicating with an outside of the first housing, and a plurality of portions, disposed on the planar surface, each having an inclined plane inclining with respect to the planar surface. At least one of the plurality of portions reflects light from the light source, causing the reflected light to exit the first housing through at least one of the plurality of openings.
Claims18
A light source apparatus comprising:
- a light source, to form a pattern during lithography on a substrate;
- and
- a first housing configured to store the light source,
- wherein a plurality of openings communicating with an outside of the first housing is formed in the first housing,
- wherein the first housing includes a plurality of portions, each having a surface inclining with respect to a planar surface of the first housing,
- wherein at least one of the plurality of portions reflects light from the light source, causing the reflected light to exit the first housing through at least one of the plurality of openings, and
- wherein the plurality of openings extend from a space inside of the first housing to a space between the first housing and a second housing surrounding at least a portion of the first housing.
A light source apparatus comprising:
- a light source;
- a first housing configured to store the light source;
- a planar surface of the first housing including a plurality of openings communicating with an outside of the first housing;
- a plurality of portions, disposed on the planar surface, each having a plane inclining with respect to the planar surface, wherein at least one of the plurality of portions reflects light from the light source, causing the reflected light to exit the first housing through at least one of the plurality of openings;
- and
- a second housing provided outside the first housing, wherein the plurality of openings allows a first space in the first housing to communicate with a second space between the first housing and the second housing.
A light source apparatus comprising:
- a light source;
- a first housing including a plurality of openings in a surface thereof;
- a second housing surrounding at least a part of the first housing;
- and
- a plurality of portions, wherein:
- the light source is positioned within the first housing,
- each opening of the plurality of openings extends from the first housing to the second housing,
- each portion of the plurality of portions is inclined with respect to the surface,
- at least one portion of the plurality of portions is configured to reflect light from the light source, and
- the reflected light exits the first housing through the at least one of the plurality of openings.
Dependencies are inferred from the claim text.