Methods and materials for metallic photoresist
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAn-Ren Zi, Ching-Yu Chang
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Abstract
Methods and materials for improving the thermal stability of a metallic photoresist are disclosed. The metallic photoresist may comprise a metal core and one or more ligands, where each ligand is saturated and comprises from 1 to about 8 carbon atoms and at least two nitrogen atoms. Alternatively, a cross-linker may be used with the metallic photoresist, the cross-linker comprising a metal core and a plurality of cross-linking groups and having a molecular weight of about 1000 or less. Finally, an additive comprising carbonate or bicarbonate anions may be added during the formation of a developed photoresist layer. Each of these methods, independently or together, improve the thermal stability of the metallic photoresist, permitting improved line resolution.
Claims14
A method, comprising:
- coating a substrate with a photoresist solution that includes a metallic component and a cross-linker;
- wherein:
- (A) the metallic component comprises:
- a metal core;
- and
- one or more ligands attached to the core,
- the cross-linker comprises:
- a metal core and
- a plurality of cross-linking groups;
- wherein the cross-linker has a molecular weight of about 1000 or less;
- and
- wherein each ligand of the metallic component has one of the following chemical structures:
A photoresist solution, comprising:
- a metallic component or a cross-linker;
- wherein either:
- (A) the metallic component comprises:
- a metal core;
- and
- one or more ligands attached to the core, wherein each ligand has one of the following structures:
- or
- (B) the cross-linker has one of the following chemical structures:
- wherein x is 1 to 20, m and n are independently 1 to 20, and y=2x.
A method, comprising:
- coating a substrate with a photoresist solution that includes a metallic component and a cross-linker, wherein;
- (A) the metallic component comprises:
- a metal core;
- and
- one or more ligands attached to the core;
- and
- (B) the cross-linker comprises:
- a metal core;
- and
- a plurality of cross-linking groups, wherein the cross-linking groups are —OH, —COOR, —NH2, or —SH, wherein R is hydrogen or alkyl;
- wherein the cross-linker has a molecular weight of about 1000 or less;
- and
- wherein each ligand of the metallic component has one of the following chemical structures:
Dependencies are inferred from the claim text.