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US 12,717,228 B2Granted
Semiconductor photoresist composition and method of forming patterns using the composition
AssigneeSamsung SDI Co., Ltd.
InventorsSeung Han, Sangkyun Im, Minyoung Lee, Jimin Kim, Yaeun Seo, Bukeun Oh
Life of this patent
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Abstract
A semiconductor photoresist composition includes a first organometallic compound, a second organometallic compound, and a solvent. A method of forming patterns utilizing the same is provided.
Claims24
A photoresist composition, comprising
- a first organometallic compound comprising a metal selected from Sn, Sb, In, Bi, Zr, and Hf;
- a second organometallic compound represented by Chemical Formula 1;
- and
- a solvent:
- wherein, in Chemical Formula 1,
- M1 is a metal selected from Sn, Sb, and Te, and
- R1 to R12 are each independently hydrogen, a halogen, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C2 to C20 alkenyl group, a substituted or unsubstituted C2 to C20 alkynyl group, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof.
4 more elements
Dependencies are inferred from the claim text.