Electrically tunable optical resonator on a chip for fast tunable integrated lasers

An electrically tunable photonic resonator device for a laser component, comprising:

• at least one optical waveguide with at least one optical interface for coupling in laser light,
• at least one optical resonator including an optical resonator waveguide being made of an optical resonator material wherein laser light coupled via the at least one optical waveguide is coupled into the at least one optical resonator,
• at least one piezo actuator to apply mechanical stress at least partially onto the at least one optical resonator, wherein the at least one optical resonator, the at least one piezo actuator and the at least one optical waveguide are monolithically integrated on a common substrate of the electrically tunable photonic resonator device;
• and
• a mechanical mode suppression means configured to attenuate one or more mechanical modes of oscillation caused by an alternating current (AC) operation of the at least one piezo actuator;
• wherein the at least one optical resonator comprises a closed circuit, the optical resonator waveguide surrounding an inner resonator plane and is coupled to the at least one optical waveguide in a respective coupling region, wherein the at least one piezo actuator covers or excludes the coupling region;
• wherein the at least one piezo actuator has an inner piezo actuator structure and an outer piezo actuator structure being distanced by a gap, wherein the gap is one of:
• in an interior of the inner resonator plane;
• at least partially covering the optical resonator waveguide;
• or
• outside of the inner resonator plane.