Photonic device mechanically isolated from a substrate

Photonic device comprising:

• a substrate;
• and
• a structure comprising a support, an optical resonator fixed to the support, and a portion of a waveguide, the portion of the waveguide being optically coupled to the optical resonator,
• wherein:
• the portion of the waveguide is fixed to the support;
• the structure is suspended above the substrate;
• the portion of the waveguide and the resonator are arranged on a same side of the support, under the support;
• the support corresponds to a first portion of a first layer;
• a second portion of the first layer is fixed to the substrate;
• and
• the support is mechanically coupled to the second portion of the first layer;
• the waveguide and the resonator are defined in a same third layer;
• the waveguide comprises another portion which does not form part of the structure and is arranged beyond the structure;
• and
• arms defined in the third layer each comprises an end in contact with this other portion of the waveguide arranged beyond the structure and an end fixed to the substrate.