Triaxial magnetic sensor and manufacturing process therefor

A triaxial magnetic sensor, wherein the triaxial magnetic sensor comprises:

• a substrate, wherein a surface of the substrate is partially concave to form at least two grooves;
• at least one first magnetic sensing mechanism, configured to detect a magnetic field in a first direction;
• at least one second magnetic sensing mechanism, configured to detect a magnetic field in a second direction;
• and
• at least two third magnetic sensing mechanisms, configured to detect a magnetic field in a third direction, wherein
• the first direction and the second direction can form a plane, the plane corresponds to the surface of the substrate, and the third direction intersects with the surface of the substrate;
• the grooves are all arranged along the first direction, or along the second direction, or partly along the first direction and partly along the second direction;
• the first magnetic sensing mechanism and the second magnetic sensing mechanism are both arranged on the surface of the substrate, the third magnetic sensing mechanisms are arranged inside the grooves, and each of the third magnetic sensing mechanisms corresponds to one of the grooves;
• and in the grooves arranged along the first direction, at least one first pair of adjacent grooves are separated by at least one first magnetic sensing mechanism, wherein a first mounting space is defined between each first pair of adjacent grooves, and the at least one first magnetic sensing mechanism is arranged in the first mounting space along the first direction;
• and/or in the grooves arranged along the second direction, at least one second pair of adjacent grooves are separated by at least one second magnetic sensing mechanism, wherein a second mounting space is defined between each second pair of adjacent grooves, and the at least one second magnetic sensing mechanism is arranged in the second mounting space along the second direction.