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US 12,716,884 B2Granted
Quality evaluation method, manufacturing system of silicon for evaluation, manufacturing method of silicon for evaluation, and silicon for evaluation
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNaruhiro Hoshino, Shigetoshi Yamagishi, Atsushi Yoshida, Masahiko Ishida
Life of this patent
Estimating the term…
Abstract
A quality evaluation method has a step of producing a silicon for evaluation in which a single crystal silicon is grown to extend radially from a core wire 9 while polycrystalline silicon is grown in a reactor 20; and a step of performing an evaluation using the single crystal silicon.
Claims4
A silicon for evaluation,
- wherein single crystal silicon extends in a growth direction from a surface of a single crystal silicon core wire, and
- wherein a part or all on an outer side of the single crystal silicon is surrounded by a polycrystalline silicon in a cross-section.
Dependencies are inferred from the claim text.