Optimized mirror-based light focusing for optical sensor assembly
AssigneeApplied Materials, Inc.
InventorsUsman Chowdhury, Farzad Houshmand, Sumit Subhash Singh, Amir H. Bayati
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Abstract
Disclosed systems include a mirror having multiple optical sections positioned about an axis of the mirror. Each optical section includes an opening leading to a respective section of a light sensor and configured to collect a portion of an incident beam of light. The focal distance of the mirror is optimized and set based on a size of the opening, a size of the illuminated area of the light sensor, a distance from the mirror to the light sensor, and/or the like.
Claims20
An optical sensor assembly comprising:
- a photonic sensor (PS) comprising a plurality of PS sections;
- and
- a mirror comprising a plurality of optical sections (OSs) positioned about an axis of the mirror, wherein each OS of the plurality of OSs comprises an opening facing a respective PS section of the plurality of PS sections and configured to:
- collect a respective portion of a plurality of portions of an incident beam of light, and
- direct, through the opening, the respective portion of the incident beam of light towards the respective PS section;
- and wherein a focal distance of the mirror is set based on one or more of:
- a size of the opening, a size of an area of the PS illuminated by the incident beam of light, or a distance from the mirror to the PS.
A photonic inspection system comprising:
- a body comprising a gas, wherein the body is coupled to a gas inlet and a gas outlet;
- a source of light to generate a light beam propagating through the gas;
- a photonic sensor (PS) comprising a plurality of PS sections positioned about an axis of the PS;
- a mirror comprising a plurality of optical sections (OSs) positioned about the axis of the PS, wherein each OS of the plurality of OSs comprises an opening facing a respective PS section of the plurality of PS sections and configured to:
- collect a respective portion of a plurality of portions of the light beam, and
- direct, through the opening, the respective portion of the light beam towards the respective PS section;
- and
- wherein a focal distance of the mirror is set based on one or more of:
- a size of the opening, a size of an area of the PS illuminated by the light beam, or a distance from the mirror to the PS.
A method of manufacturing a sensor assembly, the method comprising:
- securing, within a body of the sensor assembly, a photonic sensor (PS) comprising a plurality of PS sections;
- and
- securing, within the body of the sensor assembly, a mirror comprising a plurality of optical sections (OSs) positioned about an axis of the mirror, wherein each OS of the plurality of OSs comprises an opening facing a respective PS section of the plurality of PS sections and configured to:
- collect a respective portion of a plurality of portions of an incident beam of light, and
- direct, through the opening, the respective portion of the incident beam of light towards the respective PS section;
- and
- wherein a focal distance of the mirror is set based on one or more of:
- a size of the opening, a size of an area of the PS illuminated by the incident beam of light, or a distance from the mirror to the PS.
Dependencies are inferred from the claim text.