Measuring arrangement and method for operating a measuring arrangement
AssigneeVEGA Grieshaber KG
InventorsMartin Mellert, Bernhard Weller, Jochen Huber
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AssigneeVEGA Grieshaber KG
InventorsMartin Mellert, Bernhard Weller, Jochen Huber
Estimating the term…
The present invention relates to a measuring arrangement for determining a pressure of a fluid comprising a pressure measuring cell having a measuring chamber formed by a base body and a membrane arranged on the front side of the base body spaced apart circumferentially and able to be deformed by means of the pressure of the fluid. At least one membrane electrode is arranged on the membrane, and at least one base body electrode arranged opposite thereto on the base body, so that a distance between the membrane electrode and the base body electrode changes due to a pressure change of the fluid acting on the membrane, from which a change in capacitance can be detected. The measuring arrangement has a measuring device for determining a current flowing between the at least one membrane electrode and the at least one base body electrode.
A measuring arrangement for determining a pressure of a fluid comprising
A method for detecting moisture in a measuring arrangement comprising a pressure measuring cell which has a measuring chamber formed by a base body and a membrane arranged circumferentially on the front side of the base body and spaced apart from said base body, wherein the membrane can be deformed by means of a pressure of a fluid, the method comprising:
A method for detecting moisture in a pressure measuring cell, comprising:
Dependencies are inferred from the claim text.