Method for manufacturing bolometer
AssigneeNEC Corporation
InventorMayumi Kosaka
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AssigneeNEC Corporation
InventorMayumi Kosaka
Estimating the term…
An object of the present invention is to provide a method for manufacturing a bolometer with a resistance value. A method for manufacturing bolometer comprising: (A) forming one or more electrode pair(s) on a substrate; (B) forming an intermediate layer between the electrode pair(s) on the substrate; and (C) forming a carbon nanotube layer, comprising the following (c1) to (c3): (c1) applying a carbon nanotube dispersion onto the intermediate layer between the electrode pair and allowing it to stand to form a carbon nanotube pre-film; (c2) washing the carbon nanotube pre-film with a washing solvent; and (c3) drying the washing solvent while applying a centrifugal force, wherein a vertical component of relative centrifugal acceleration with respect to at least one of a first electrode wall and a second electrode wall facing each other of the electrode pair is in the range of 50×g to 900×g.
A method for manufacturing bolometer comprising:
Dependencies are inferred from the claim text.