Device for visualizing temperature and amount of static electricity

A device for visualizing a temperature and an amount of static electricity comprising:

• a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target in a plurality of modes;
• a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target;
• a thermal imaging camera configured to measure temperature levels of the plurality of areas of the measurement target;
• an integrated sensor comprising an output unit configured to output a visualization image in which the static electricity levels measured by the static electricity sensor and the temperature levels measured by the thermal imaging camera are visualized on the plurality of partially captured images;
• and
• a processor configured to control the integrated sensor and generate an entire image by combining the plurality of partially captured images with each other,
• wherein the visualization image comprises colors respectively corresponding the static electricity levels of the measurement target measured by the static electricity sensor and the temperature levels of the measurement target measured by the thermal imaging camera on the entire image, and
• wherein the device is arranged adjacent to a substrate processing liquid providing unit comprising a pipe providing a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid.

A device for visualizing a temperature and an amount of static electricity comprising:

• a photographing unit configured to generate a plurality of partially captured images by photographing a plurality of areas of a measurement target;
• a static electricity sensor configured to measure static electricity levels of the plurality of areas of the measurement target;
• a thermal imaging camera configured to measure temperatures of the plurality of areas of the measurement target;
• a processor configured to generate an entire image by combining the plurality of partially captured images with each other;
• an output unit configured to output a visualization image in which temperature levels measured by the thermal imaging camera and the static electricity levels measured by the static electricity sensor are visualized on the entire image;
• a distance sensor configured to measure a distance between the measurement target and the static electricity sensor;
• an integrated sensor comprising the photographing unit, the static electricity sensor, the thermal imaging camera, the output unit, and the distance sensor;
• and
• an image processing unit configured to preprocess the plurality of partially captured images,
• wherein the visualization image comprises colors respectively corresponding to the temperature levels and the static electricity levels of the measurement target measured by the thermal imaging camera and the static electricity sensor, in the entire image generated by combining the plurality of partially captured images with each other,
• the static electricity sensor is further configured to, in response to the distance between the measurement target and the static electricity sensor being less than or equal to a threshold value, send data regarding the measured static electricity levels to the processor,
• the processor is further configured to control the integrated sensor and generate the entire image by combining the plurality of partially captured images with each other by using a stitching algorithm,
• the measurement target is an exterior of a substrate seated on a substrate cleaning device, an exterior of the pipe, or an exterior of the processing liquid storage module,
• the device is arranged adjacent to a substrate processing liquid providing unit comprising a pipe providing a passage through which a substrate processing liquid is transferred and a processing liquid storage module for storing the substrate processing liquid.