Liquid supply device with function of reducing generation of particles

A liquid supply device that reduces particle generation, the liquid supply device comprising:

• a pump configured to supply a liquid to a nozzle within a wafer processing chamber;
• a controller configured to control the pump;
• a main power source configured to supply electrical power to the pump;
• and
• an auxiliary power source configured to supply auxiliary electrical power to the pump, wherein the auxiliary power source is spaced apart from the main power source,
• wherein the pump comprises a stator, a coil surrounding the stator, a case having an internal space, and an impeller within the internal space, wherein the impeller is rotated by a magnetic force generated by the stator and the coil, and
• wherein, when the electrical power is shut off from the main power source to the coil, the controller is configured to control the auxiliary power source to supply the auxiliary electrical power to the pump to reduce a rotational speed of the impeller and stop the pump,
• wherein the pump is a magnetic levitation-type pump configured to rotate the impeller in a non-contact manner by the magnetic force,
• wherein at least a portion of the impeller contacts the case when the impeller is at rest, and
• wherein the impeller comprises:
• an impeller body:
• a permanent magnet inside the impeller body;
• and
• an impeller arm that protrudes from the impeller body in a direction perpendicular to a rotation axis of the impeller body, and wherein the impeller arm contacts the case when the impeller is at rest.

A liquid supply device that reduces particle generation, the liquid supply device comprising:

• a pump configured to supply a liquid to a nozzle within a wafer processing chamber;
• a controller configured to control the pump;
• a main power source configured to supply electrical power to the pump;
• and
• an interface configured to provide operational control of the controller to a user,
• wherein the pump comprises a stator, a coil surrounding the stator, a case having an internal space, and an impeller within the internal space, wherein the impeller is rotated by a magnetic force generated by the stator and the coil, and
• wherein, when the electrical power is shut off from the main power source to the coil, the controller is configured to reduce a rotational speed of the impeller and stop the pump,
• wherein the pump is a magnetic levitation-type pump configured to rotate the impeller in a non-contact manner by the magnetic force,
• wherein at least a portion of the impeller contacts the case when the impeller is at rest, and
• wherein the impeller comprises:
• an impeller body:
• a permanent magnet inside the impeller body;
• and
• an impeller arm that protrudes from the impeller body in a direction perpendicular to a rotation axis of the impeller body, and wherein the impeller arm contacts the case when the impeller is at rest.