Vacuum tunneling device and method of manufacturing the same
AssigneesSamsung Electronics Co., Ltd., Daegu Gyeongbuk Institute of Science and Technology
InventorsChanghoon Jeon, Jaeeun Jang, Sujin Heo, Sohee Kim, Hyunwoo Jang, Gisoon Choi
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Abstract
A method of manufacturing a vacuum tunneling device, the method including forming a tunnelling device on a substrate; forming an insulating interlayer on the substrate such that the insulating interlayer has an opening exposing the tunneling device; and performing a gradient deposition process in a vacuum chamber to form a sealing layer on the insulating interlayer such that the sealing layer fills an upper portion of the opening.
Claims18
A method of manufacturing a vacuum tunneling device, the method comprising:
- forming a tunnelling device including a transistor or a diode on a substrate;
- forming an insulating interlayer on the substrate such that the insulating interlayer has an opening exposing the tunneling device;
- and
- performing a gradient deposition process in a vacuum chamber to form a sealing layer on the insulating interlayer such that the sealing layer fills an upper portion of the opening and a vacuum is formed in the remaining portion of the opening that is not filled by the sealing layer.
A method of manufacturing a vacuum tunneling device, the method comprising:
- forming a tunnelling device on a substrate;
- forming an insulating interlayer on the substrate such that the insulating interlayer has an opening exposing the tunneling device;
- forming an auxiliary layer on the insulating interlayer to at least partially cover a top end of the opening, wherein an upper surface of the auxiliary layer is higher than an upper surface of the insulating interlayer;
- and
- forming a sealing layer on the auxiliary layer and the insulating interlayer in a vacuum chamber such that the sealing layer fills an upper portion of the opening that is not covered by the auxiliary layer and a vacuum is formed in the remaining portion of the opening that is not filled by the sealing layer.
Dependencies are inferred from the claim text.