Photocurable composition
AssigneeCanon Kabushiki Kaisha
InventorsFen Wan, Weijun Liu, Toshiki Ito
Life of this patent
Estimating the term…
Abstract
A photocurable composition can comprise comprising a polymerizable material, a photoinitiator, and a photoacid generator, wherein the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 10 wt % based on the total weight of the polymerizable material and the photoinitiator includes an oxime ester compound. The photocurable composition can be suitable for inkjet adaptive planarization (IAP) processing and the forming of photo-cured layers having a high thermal stability and low thermal shrinkage.
Claims20
A photocurable composition comprising a polymerizable material, a photoinitiator, and a photoacid generator, wherein
- the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 10 wt % based on the total weight of the polymerizable material;
- and
- the photoinitiator includes an oxime ester compound.
A method of forming a photo-cured layer on a substrate, comprising:
- applying a layer of a photocurable composition on the substrate, wherein the photocurable composition comprises a polymerizable material, a photoinitiator, and a photoacid generator, wherein the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 10 wt % based on the total weight of the polymerizable material;
- and the photoinitiator includes an oxime ester compound;
- bringing the photocurable composition into contact with a template or a superstrate;
- irradiating the photocurable composition with light to form a photo-cured layer;
- and
- removing the template or the superstrate from the photo-cured layer.
A method of manufacturing an article, comprising:
- applying a layer of a photocurable composition on a substrate, wherein the photocurable composition comprises a polymerizable material, a photoinitiator, and a photoacid generator, wherein the polymerizable material comprises at least one multi-functional vinylbenzene monomer in an amount of at least 10 wt % based on the total weight of the polymerizable material;
- and the photoinitiator includes an oxime ester compound;
- bringing the photocurable composition into contact with a template or a superstrate;
- irradiating the photocurable composition with light to form a photo-cured layer;
- removing the template or the superstrate from the photo-cured layer;
- forming a pattern on the substrate;
- processing the substrate on which the pattern has been formed in the forming;
- and
- manufacturing an article from the substrate processed in the processing.
Dependencies are inferred from the claim text.