Ceramic article, semiconductor apparatus for manufacturing a semiconductor structure and method of manufacturing a ceramic article

Abstract

A ceramic article includes a ceramic body including a spinel (MgAl2O4) structure, wherein a ratio of a density of the spinel structure to a theoretical density of a spinel is greater than 99.5%. A semiconductor apparatus for manufacturing a semiconductor structure includes a ceramic article including a spinel (MgAl2O4) structure, wherein a ratio of a density of the spinel structure to a theoretical density of a spinel is greater than 99.5%. A method of manufacturing a ceramic article includes providing a green body; heating the green body to a sintering temperature; compressing the green body; applying a electrical pulse to the green body; and forming a ceramic body including a spinel (MgAl2O4) structure after heating, compressing and applying the electrical pulse to the green body.

Dependencies are inferred from the claim text.