Microelectromechanical acoustic component

A microelectromechanical component for interacting with a pressure gradient of a fluid, comprising:

• a substrate having a through-cavity;
• at least one microelectromechanical transducer including a middle support layer;
• and
• two diaphragm elements spaced apart from the middle support layer;
• wherein the middle support layer has at least one center electrode, wherein the diaphragm elements each have a separately contactable outer electrode, wherein the diaphragm elements together with the middle support layer form a cavity or a plurality of cavities on both sides of the middle support layer at least in regions, wherein the microelectromechanical transducer spans the through-cavity at least partially and is deformable along a vertical movement direction, wherein the microelectromechanical transducer has a bending region, wherein a deformation of the microelectromechanical transducer in a vertical movement direction results in a bending of the bending region, wherein spacers are arranged between the middle support layer and the diaphragm elements, and wherein at least one of the spacers is arranged in the bending region,
• wherein the microelectromechanical component includes a plurality of microelectromechanical transducers, each including a respective middle support layer and two respective diaphragm elements spaced apart from the respective middle support layer, wherein the respective middle support layer has at least one center electrode, wherein the respective diaphragm elements of each of the microelectromechanical transducers each have a separately contactable outer electrode, wherein the respective diaphragm elements together with the respective middle support layer form a respective cavity or a respective plurality of cavities on both sides of the respective middle support layer at least in regions, wherein the microelectromechanical transducers span the through-cavity at least partially and are deformable along a vertical movement direction, wherein the microelectromechanical transducers each have a respective bending region, wherein a deformation of the microelectromechanical transducers in the vertical movement direction in each case results in a bending of the respective bending region of the relevant microelectromechanical transducer, wherein respective spacers are arranged between the respective middle support layer and the respective diaphragm elements, wherein at least one of the respective spacers is arranged in each respective bending region.

A method for operating a microelectromechanical component, the micromechanical component including:

• a substrate having a through-cavity;
• at least one microelectromechanical transducer including a middle support layer;
• and
• two diaphragm elements spaced apart from the middle support layer;
• wherein the middle support layer has at least one center electrode, wherein the diaphragm elements each have a separately contactable outer electrode, wherein the diaphragm elements together with the middle support layer form a cavity or a plurality of cavities on both sides of the middle support layer at least in regions, wherein the microelectromechanical transducer spans the through-cavity at least partially and is deformable along a vertical movement direction, wherein the microelectromechanical transducer has a bending region, wherein a deformation of the microelectromechanical transducer in a vertical movement direction results in a bending of the bending region, wherein spacers are arranged between the middle support layer and the diaphragm elements, and wherein at least one of the spacers is arranged in the bending region;
• wherein the method comprises:
• determining a capacitance between the center electrode and the respective outer electrodes to detect a bending of the bending region and thus a deformation of the microelectromechanical transducer in the vertical movement direction.