Manufacturing an optical structure
AssigneeHeptagon Photonics Pte. Ltd.
InventorsNicola Spring, Sebastiano Lazzi Gazzini
Life of this patent
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Abstract
A method of manufacturing an optical structure may include providing a base structure that includes a substrate having an optical element extending from a first side of the substrate and dispensing liquid photoresist onto the base structure. The method may further include forming a layer of said liquid photoresist where the height of said layer is controlled by lowering the tool to a height above said substrate, and forming a spacer from the liquid photoresist by exposing a portion of the liquid photoresist to ultraviolet light. The spacer may include a central aperture above the optical element.
Claims17
A method of manufacturing an optical structure, wherein the method comprises:
- providing a base structure comprising a substrate having an optical element extending from a first side of the substrate;
- dispensing liquid photoresist onto the base structure to form a layer of said liquid photoresist;
- lowering a tool to a height above said substrate to control a height of said layer,
- wherein the height of said layer is uniform and defined by a contact spacer portion forming a ring around a periphery of a lower surface of the tool,
- wherein the tool comprises the contact spacer portion, and
- wherein the contact spacer portion contacts the base structure to set the uniform height of said layer;
- and
- exposing a portion of the liquid photoresist to ultraviolet light to form a spacer;
- wherein the spacer comprises a central aperture above the optical element, and
- wherein the spacer has the uniform height defined by the contact spacer portion of the tool.
An optical structure comprising:
- a base structure comprising:
- a substrate having an optical element extending from a first side of the substrate;
- and
- a yard surrounding the optical element;
- and
- a spacer formed of a photoresist material uniformly on the base structure, wherein the spacer comprises a central aperture above the optical element, wherein the spacer covers the yard and a portion of the optical element, and
- wherein a height of the spacer is defined by a uniform height set by a contact spacer portion of a tool used during manufacturing, the contact spacer portion forming a ring around a periphery of a lower surface of the tool.
Dependencies are inferred from the claim text.