Laser devices including beam position calibrator and method for irradiating laser by using the same
AssigneeSamsung Display Co., Ltd.
InventorsAlexander Voronov, Gyoo Wan Han, Woo Hyun Jung, Jung Hwa You
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Abstract
Provided is a laser device. The laser device according to an embodiment includes a laser source that provides a laser beam to a process object, a laser deflector that deflects the laser beam supplied from the laser source, an object lens that focuses scattered light of the laser beam that has been incident on the process object and then scattered, an image capture device that captures an image of the scattered light focused in the object lens, and a corrector that corrects a position of the laser beam by using the captured image.
Claims20
A laser device comprising:
- a laser source generating a laser beam;
- a laser deflector deflecting the laser beam supplied from the laser source to be irradiated to a process object which includes a first surface on which an alignment mark is disposed and a second surface connected to the first surface and extending from the first surface substantially perpendicular to the first surface, the deflected laser beam being irradiated in a direction substantially perpendicular to the second surface of the process object wherein the second surface does not include an alignment mark;
- an object lens focusing scattered light of the laser beam that is scattered from the second surface of the process object;
- an image capture device capturing an image of the scattered light focused by the object lens and an image of the alignment mark disposed on the first surface of the process object;
- and
- a corrector correcting a position of the laser beam by using the captured image of the scattered light focused by the object lens and the captured image of the alignment mark.
A laser irradiation method comprising steps of:
- generating a laser beam having a first intensity;
- irradiating the laser beam to a process object which includes a first surface on which an alignment mark is disposed and a second surface connected to the first surface and extending from the first surface substantially perpendicular to the first surface, the laser beam being irradiated in a direction substantially perpendicular to the second surface of the process object to a plurality of positions by scanning the generated laser beam wherein the second surface does not include an alignment mark;
- capturing a first image of scattered light of the laser beam which is scattered from the second surface of the process object and a second image of alignment marks disposed on a first surface of the process object;
- calculating a position error of the laser beam by using the captured first image and the captured second image;
- and
- correcting the calculated position error.
Dependencies are inferred from the claim text.