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US 12,714,404 B2Granted
Flexible capacitive micromachined ultrasonic transducer arrays
AssigneeThe University of British Columbia
InventorsRobert Rohling, Carlos D. Gerardo, Edmond Cretu
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Abstract
An apparatus comprising an array of polymer-based capacitive micromachined ultrasonic transducers positioned on a substrate. The substrate may be at least substantially transparent to ionizing radiation, be flexible, and/or have walls positioned thereon to protect the transducers.
Claims26
An apparatus comprising:
- (i) a substrate;
- and
- (ii) an array of polymer-based capacitive micromachined ultrasonic transducers positioned on the substrate, the array comprising a first row of the transducers and electrical interconnections electrically connecting the transducers of the first row in series;
- and
- (iii) two rows of walls extending from a same side of the substrate as the transducers of the first row and positioned such that the first row of the transducers is between the two rows of walls, wherein the walls are taller than the first row of transducers.
2 more elements
Dependencies are inferred from the claim text.