Ultrasonic probe and ultrasonic system

An ultrasonic system comprising:

• an ultrasonic probe attached to a target to perform ultrasonic measurement, the ultrasonic probe including:
• three directions perpendicular to one another being defined as an X direction, a Y direction, and a Z direction;
• a housing provided with an opening facing along the Z direction;
• a first substrate housed in the housing, the first substrate including an ultrasonic element array in which a plurality of ultrasonic elements performing at least one of transmission of ultrasonic waves and reception of ultrasonic waves are arranged in an array, the first substrate being configured with:
• an ultrasonic substrate having first and second surfaces opposite to each other, each of the first and second surfaces extending along an X-Y plane, the X-Y plane extending along the X direction and the Y direction, the first surface facing the opening of the housing along the Z direction, the plurality of ultrasonic elements being provided on the second surface, the ultrasonic substrate having a plurality of partition walls on the first surface, each of the plurality of partition walls extending along the Z direction and being located between two adjacent ultrasonic elements of the plurality of ultrasonic elements via the ultrasonic substrate when viewed in a cross section, the cross section being along a Y-Z plane, the Y-Z plane extending along the Y direction and the Z direction, the ultrasonic waves passing through the opening of the housing;
• and
• a device substrate having third and fourth surfaces, each of the third and fourth surfaces extending along the X-Y plane, the device substrate having a plurality of legs that are formed on the third surface of the device substrate and are bonded to the second surface of the ultrasonic substrate at a plurality of positions to form a plurality of inner spaces between the second surface and the third surface when viewed in the cross section, each of the plurality of legs extending along the Z direction, the plurality of positions being aligned with the plurality of partition walls via the ultrasonic substrate when viewed in the cross section;
• and
• a second substrate housed in the housing, the second substrate facing the fourth surface of the device substrate along the Z direction;
• and
• a terminal device communicably connected via a communication interface, wherein the second substrate includes the communication interface and a battery, the communication interface and the battery are disposed on the same plane of the second substrate, and the communication interface is coupled to the plurality of ultrasonic elements and is configured to communicate wirelessly with the terminal device,
• a weight of the ultrasonic probe is 150 g or less, and
• the ultrasonic substrate is located closer to the opening of the housing than the device substrate.