Apparatus and method for selectively forming a shielding layer on a semiconductor package
OwnerGunHyuck Lee, Yujeong Janginventors
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OwnerGunHyuck Lee, Yujeong Janginventors
Estimating the term…
An apparatus for selectively forming a shielding layer on a semiconductor package is provided. The apparatus includes: a tray including a plurality of package seats, the tray defines, for each of the plurality of package seats, one or more sets of guide holes outside the package seat; deposition masks, each of the deposition masks includes: a set of pins releasably inserted within one set of the one or more sets of guide holes to place the deposition mask on the tray; and a cover attached to the set of pins, the cover is configured to cover at least a portion of an outer surface of a semiconductor package received within a package seat when the set of pins is inserted within the set of guide holes associated with the package seat; and a deposition source configured to deposit a shielding material.
An apparatus for selectively forming a shielding layer on a semiconductor package, comprising:
Dependencies are inferred from the claim text.