Semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsAnthony Dongick Lee, Min Chan Gwak, Guk Hee Kim, Young Woo Kim, Sang Cheol Na, Kyoung Woo Lee
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AssigneeSamsung Electronics Co., Ltd.
InventorsAnthony Dongick Lee, Min Chan Gwak, Guk Hee Kim, Young Woo Kim, Sang Cheol Na, Kyoung Woo Lee
Estimating the term…
A semiconductor device includes an active pattern on a first surface of a substrate and extending in a first direction, a field insulating film on the first surface and a side surface of the active pattern, a gate structure on the active pattern and field insulating film and extending in a second direction intersecting the first direction, a source/drain area on a side surface of the gate structure and contacting the active pattern, and a through-contact extending in a third direction perpendicular to the first and second directions and extending through the field insulating film. The device further includes a buried pattern in the substrate contacting the through-contact, a backside wiring structure on a second surface of the substrate and electrically connected to the buried pattern, and a heat-dissipating structure in the substrate adjacent to the buried pattern. The heat-dissipating structure fills a trench extending from the second surface into the substrate.
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.