Multilayer capacitors with interdigitated fingers

A method of making a circuit, the method comprising:

• forming a semiconductor layer over a substrate;
• forming a dielectric layer over the semiconductor layer;
• forming a conductive layer over the dielectric layer to provide a capacitor, the conductive layer having an opening in a center region;
• forming an insulating layer over the conductive layer;
• and
• forming a first metal layer over the insulating layer, the first metal layer having a first portion and a second portion that is insulated from the first portion, the first portion electrically coupled to the semiconductor layer with one or more electrical connections that extend through the opening in the conductive layer, the first portion having a first plurality of fingers, and the second portion electrically coupled to the conductive layer and having a second plurality of fingers that are interdigitated with the first plurality of fingers.

A capacitor comprising:

• a cathode layer;
• an anode layer with an opening in a center region;
• an insulating layer between the cathode layer and the anode layer;
• a first plurality of fingers that are electrically coupled to the cathode layer with one or more electrical connectors that extend through the opening in the anode layer;
• and
• a second plurality of fingers that are electrically coupled to the anode layer, the second plurality of fingers interdigitated with the first plurality of fingers to increase capacitance of the capacitor.