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US 12,713,877 B2Granted
Chuck assembly
AssigneeApet Co., Ltd.
InventorsTae Woo Kim, Sang Su Lee, Jae Hoon Hwang
Life of this patent
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Abstract
A chuck assembly according to an embodiment of the present invention includes: a rotary table on which a substrate is mounted; a rotating part concentric with a rotation center of the rotary table; and a chuck pin supporting the substrate, wherein the rotary table may include a protrusion protruding upward from a surface facing the substrate, the chuck pin may be coupled to the protrusion in such a way that the protrusion is drawn into the chuck pin, and the protrusion may be provided integrally with the surface of the rotary table facing the substrate.
Claims7
A chuck assembly comprising:
- a rotary table on which a substrate is mounted;
- a rotating part concentric with a rotation center of the rotary table;
- and
- a chuck pin supporting the substrate,
- wherein the rotary table comprises a protrusion protruding upward from a surface of the rotary table facing the substrate,
- the chuck pin is coupled to the protrusion in such a way that the protrusion is drawn into the chuck pin, and
- the protrusion is provided integrally with the surface of the rotary table facing the substrate,
- wherein the chuck pin comprises a cover and a body, and the body extends upward from the protrusion and into the cover.
5 more elements
Dependencies are inferred from the claim text.