Semiconductor device and semiconductor manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Chi Lin, Tsang-Jiuh Wu, Wen-Chih Chiou
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Chi Lin, Tsang-Jiuh Wu, Wen-Chih Chiou
Estimating the term…
A semiconductor device and a semiconductor manufacturing method thereof are provided. The semiconductor manufacturing method includes the following streps. A first semiconductor element with a first bonding film is formed. The first bonding film is formed on a first side of the first semiconductor element. The first semiconductor element and the first bonding film form a taper structure. The first bonding film forms a wide portion of the taper structure. The first semiconductor element forms a narrow portion of the taper structure. A second semiconductor element with a second bonding film is formed. The second bonding film is formed on the second semiconductor element. The first semiconductor element and the second semiconductor element are bonded by bonding the first bonding film and the second bonding film. An oxide layer is filled to surround the first semiconductor element and the first bonding film.
A semiconductor manufacturing method, comprising:
A semiconductor manufacturing method, comprising:
A semiconductor manufacturing method, comprising:
Dependencies are inferred from the claim text.