Transducer and method for manufacturing same

A method for manufacturing a transducer comprising:

• a step of forming a piezoelectric element on a vibrating film formation layer that is formed on a supporting substrate;
• a step of forming a slit penetrating through the vibrating film formation layer in a thickness direction to form, in the vibrating film formation layer, a vibrating film and a frame body that surrounds the vibrating film and with which a portion is connected to a portion of an outer peripheral edge of the vibrating film;
• a step of forming an internal wiring with one end portion side being electrically connected to the piezoelectric element and having, at another end portion side, a pad portion for external wiring connection on the frame body;
• and
• a step of etching the supporting substrate from a cavity formation planned region of a front surface of the supporting substrate at an opposite side to the vibrating film formation layer to form, in a region facing the vibrating film, a cavity that is in communication with the slit;
• and
• wherein a cantilever that includes the vibrating film and a portion of the piezoelectric element disposed on the vibrating film and has a fixed end and a free end is formed by the step of forming the cavity,
• a step of fixing, to the supporting body, a protective substrate having a wall portion formed such as to surround the cantilever is further included,
• the wall portion has, at a location corresponding to a length intermediate portion of the connection portion, a cutout portion in which the wall portion is not present, and the pad portion is disposed at the cutout portion side with respect to the connection portion.