Acoustic wave device with multilayer interdigital transducer electrode

A shear horizontal acoustic wave device comprising:

• a lithium niobate piezoelectric layer having a cut angle in a range of −20° YX to 25° YX and configured such that a shear horizontal mode is a main mode of the acoustic wave device;
• an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a first layer having a first thickness and a second layer having a second thickness, a material of the first layer being more dense than a material of the second layer, the first layer positioned between the piezoelectric layer and the second layer, the first thickness being greater than the second thickness and is configured such that a frequency response of the acoustic wave device includes a Rayleigh mode response at a frequency higher than a shear horizontal mode response resonance;
• and
• a temperature compensation layer over the interdigital transducer electrode.

An acoustic wave device comprising:

• a lithium niobate piezoelectric layer having a cut angle in a range of −20° YX to 25° YX such that a shear horizontal mode is a main mode of the acoustic wave device;
• an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a tungsten layer having a first thickness and an aluminum layer having a second thickness, the tungsten layer positioned between the lithium niobate piezoelectric layer and the aluminum layer, the first thickness configured such that a frequency response of the acoustic wave device includes a Rayleigh mode response at a frequency higher than a shear horizontal mode response;
• and
• a temperature compensation layer over the interdigital transducer electrode.