Recessed frames in thickness mode piezoelectric resonators
AssigneeTexas Instruments Incorporated
InventorsSteffen Paul Link, Ting-Ta Yen, Jeronimo Segovia-Fernandez
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AssigneeTexas Instruments Incorporated
InventorsSteffen Paul Link, Ting-Ta Yen, Jeronimo Segovia-Fernandez
Estimating the term…
In some examples, an apparatus includes a first metal layer having a thickness, a piezoelectric material layer having a first side and a second side that is opposite the first side, the piezoelectric material layer first side abutting the first metal layer, the piezoelectric material layer second side having recesses, and a second metal layer abutting the piezoelectric material layer second side, the second metal layer having extensions that fill the recesses to form a metal frame that is at least partially recessed into the piezoelectric material layer. The first metal layer, the piezoelectric material layer, and the second metal layer form a resonator body. The metal frame has a shape governing a resonant mode of the resonator body.
An apparatus, comprising:
A system, comprising:
A device, comprising:
Dependencies are inferred from the claim text.