Electrode structure with corrosion resistance and power durability
AssigneeRF360 Singapore Pte. Ltd.
InventorsAnja Fenchel, Marc Konstantin Dietrich, Valentin Albrecht Weippert, Matthias Honal
Life of this patent
Estimating the term…
Abstract
An apparatus for filtering is disclosed that implements an electrode structure with corrosion resistance and power durability. In an example aspect, the apparatus includes an acoustic filter with a piezoelectric layer and the electrode structure. The electrode structure is formed by a metal layer comprising copper and silicon and by an adhesion layer. The adhesion layer is deposited between the metal layer and the piezoelectric layer.
Claims30
An apparatus comprising:
- an acoustic filter comprising:
- a piezoelectric layer;
- and
- an electrode structure formed by:
- a metal layer comprising a combination of copper and silicon, wherein the copper forms a first part of the metal layer and the silicon forms a second part of the metal layer;
- and
- an adhesion layer deposited between the metal layer and the piezoelectric layer.
A method of manufacturing an electrode structure of an acoustic filter, the method comprising:
- providing an adhesion layer;
- and
- providing a metal layer including a combination of a silicon layer and a copper layer on one side of the adhesion layer, wherein the copper layer forms a first part of the metal layer and the silicon layer forms a second part of the metal layer.
An apparatus comprising:
- an acoustic filter comprising:
- a piezoelectric layer;
- and
- an electrode structure having a first surface that faces the piezoelectric layer and a second surface that is opposite the first surface, an axis being approximately perpendicular to the first surface and the second surface, the electrode structure comprising:
- copper atoms forming a first part of the electrode structure;
- silicon atoms forming a second part of the electrode structure, the silicon atoms having, along the axis, a higher concentration proximate to the second surface compared to the first surface, wherein the silicon atoms are distributed between at least a portion of the copper atoms;
- and
- chromium atoms having, along the axis, a higher concentration proximate to the first surface compared to the second surface.
An apparatus comprising:
- an acoustic filter comprising:
- a piezoelectric layer;
- and
- an electrode structure formed by:
- a metal layer comprising copper and silicon, wherein the copper comprises copper atoms and the silicon comprises silicon atoms, and wherein a quantity of the silicon atoms is between approximately half a percent and ten percent of a quantity of the copper atoms;
- and
- an adhesion layer deposited between the metal layer and the piezoelectric layer;
- wherein:
- an axis is approximately perpendicular to two opposite surfaces of the electrode structure and passes through the metal layer and the adhesion layer;
- and
- the copper atoms and the silicon atoms are distributed within the metal layer along at least a portion of the axis.
Dependencies are inferred from the claim text.