Electrical connector for a substrate support assembly

An electrostatic chuck for semiconductor manufacturing, the electrostatic chuck comprising:

• a first plate;
• a second plate;
• and
• an electrical connector disposed between the first plate and the second plate, the electrical connector comprising:
• a first interface body comprising:
• a connector cover
• an outer face;
• and
• a plurality of first electrical terminals;
• a second interface body coupled to the first interface body, the second interface body comprising:
• a plurality of electrical pathways;
• a plurality of second electrical terminals disposed in a plurality of sockets;
• and
• a recess disposed within the second interface body, the recess comprising a first vertical face, the first vertical face disposed adjacent the outer face of the first interface body;
• an adhesive sealingly securing the first vertical face and the outer face, a space defined between the first vertical face and the outer face is filled void free with the adhesive;
• and
• a bus bar disposed in the recess, connecting at least two of the plurality of first electrical terminals to at least a one of the plurality of second electrical terminals.

An substrate support assembly for semiconductor manufacturing, the substrate support assembly comprising:

• an electrostatic chuck (ESC);
• an ESC base assembly disposed between the ESC and a facility plate;
• and
• an electrical connector disposed between and partially within the ESC base assembly and the facility plate, the electrical connector comprising:
• a first interface body comprising:
• a connector cover;
• an outer face;
• and
• a plurality of first electrical terminals;
• a second interface body coupled to the first interface body, the second interface body comprising:
• a plurality of electrical pathways;
• a plurality of second electrical terminals disposed in a plurality of sockets;
• and
• a recess disposed within the second interface body, the recess comprising a first vertical face, the first vertical face disposed adjacent the outer face of the first interface body;
• an adhesive sealingly securing between the first vertical face and the outer face, a space defined between the first vertical face and the outer face is filled void free with the adhesive;
• and
• a bus bar disposed in the recess, connecting at least two of the plurality of first electrical terminals to at least a one of the plurality of second electrical terminals.