Bipolar electrostatic chuck electrode designs

A substrate support assembly, comprising:

• an electrostatic chuck body defining a substrate support surface that defines a substrate seat;
• a support stem coupled with the electrostatic chuck body;
• a first bipolar electrode embedded within the electrostatic chuck body;
• a second bipolar electrode embedded within the electrostatic chuck body, wherein:
• an entirety of the second bipolar electrode is radially inward of at least a portion of the first bipolar electrode;
• the first bipolar electrode and the second bipolar electrode are coaxial with one another;
• each of the first bipolar electrode and the second bipolar electrode is coupled with at least one RF power supply;
• each of the first bipolar electrode and the second bipolar electrode is coupled with at least one DC power supply;
• and
• the first bipolar electrode and the second bipolar electrode have substantially the same area;
• and
• an annular electrode disposed about the first bipolar electrode, wherein the annular electrode is DC floated and RF powered.