Impedance matching circuit, power supply apparatus, and plasma processing equipment including same

Plasma processing equipment comprising:

• a processing chamber configured to perform processing with respect to a substrate;
• and
• a power supply apparatus configured to supply power to the processing chamber to generate plasma,
• wherein the power supply apparatus comprises:
• a first power supply part comprising a first radio frequency (RF) power supply configured to generate a first RF signal, a first matching circuit connected to the first RF power supply, and a first power transfer circuit configured to transfer the first RF signal to a plasma load;
• a second power supply part comprising a second RF power supply configured to generate a second RF signal, a second matching circuit connected to the second RF power supply, and a second power transfer circuit configured to transfer the second RF signal to the plasma load;
• and
• a decoupling part configured to remove interference between the first power supply part and the second power supply part,
• wherein each of the first matching circuit and the second matching circuit comprises a mechanical vacuum variable capacitor and a plurality of electrical variable capacitor modules connected to the mechanical vacuum variable capacitor in parallel, and
• wherein, when a process condition of the processing chamber is changed, as the plurality of electrical variable capacitor modules are controlled while a capacitance of the mechanical vacuum variable capacitor is fixed, an impedance of each of the first matching circuit and the second matching circuit is adjusted,
• wherein the first matching circuit comprises:
• a first parallel capacitor array comprising a plurality of capacitors connected to each other in parallel;
• and
• a first series capacitor array comprising a plurality of capacitors connected to the first parallel capacitor array in series, and
• wherein the second matching circuit comprises:
• a second parallel capacitor array comprising a plurality of capacitors connected to each other in parallel;
• and
• a second series capacitor array comprising a plurality of capacitors connected to the second parallel capacitor array in series.