Electron beam monitoring device and electron beam irradiation system
AssigneeHamamatsu Photonics K.K.
InventorShinjiro Matsui
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Abstract
An electron beam monitoring device monitors an electron beam in an electron beam irradiation system having an electron beam irradiation device configured to irradiate an irradiation target object with the electron beam via an emission window. The electron beam monitoring device includes a first X-ray detection unit and a second X-ray detection unit. The first X-ray detection unit has a detection surface directed toward between the emission window and the irradiation target object and detects an X-ray. The second X-ray detection unit is arranged to face the emission window and detects a one-dimensional or two-dimensional distribution of the X-ray.
Claims16
An electron beam monitoring device monitoring an electron beam in an electron beam irradiation system having an electron beam irradiation device configured to irradiate an irradiation target object with the electron beam via an emission window, the electron beam monitoring device comprising:
- a first X-ray detection unit having a detection surface directed toward between the emission window and the irradiation target object and configured to detect an X-ray;
- and
- a second X-ray detection unit arranged to face the emission window and configured to detect a one-dimensional or two-dimensional distribution of the X-ray.
Dependencies are inferred from the claim text.