Charged-particle optical device
AssigneeASML Netherlands B.V.
InventorMarco Jan-Jaco Wieland
Life of this patent
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Abstract
Charged-particle optical devices are disclosed. In one arrangement, a device includes a charged particle column and a light sensor. An objective lens array projects a plurality of beams towards a sample and has a plurality of electrodes arranged along a path of the plurality of beams. A plurality of scintillators receives signal particles emitted from the sample. Light is generated in response to the received signal particles. A light guiding arrangement guides light generated by the scintillators to the light sensor. The light guiding arrangement includes a mirror defining a plurality of apertures to allow passage of the plurality of beams through the mirror towards the sample.
Claims20
A charged-particle optical device configured to project a plurality of beams of charged particles to a sample, the device comprising a charged particle column and a light sensor, the charged particle column comprising:
- an objective lens array configured to project the plurality of beams towards the sample and comprising a plurality of electrodes arranged along a path of the plurality of beams;
- a plurality of scintillators configured to receive signal particles emitted from the sample and to generate light in response to the received signal particles;
- and
- a light guiding arrangement configured to guide the light generated by the scintillators to the light sensor for detection by the light sensor, the light guiding arrangement comprising a mirror defining a plurality of apertures to allow for passage of the plurality of beams through the mirror towards the sample.
A detector for a charged-particle optical device configured to project a plurality of beams of charged particles to a sample, the detector comprising:
- a light sensor;
- a plurality of scintillators configured to receive signal particles emitted from the sample responsive to projection of the beams of charged particles onto the sample and to generate light in response to the received signal particles;
- and
- a light guiding arrangement configured to guide the light generated by the scintillators to the light sensor for detection by the light sensor, the light guiding arrangement comprising a mirror defining a plurality of apertures to allow for passage of the plurality of beams through the mirror towards the sample.
Dependencies are inferred from the claim text.