Sample holder, electron microscope system and sample observation method

A sample observation method for observing a sample held in a sample holder using an electron microscope system, wherein

• the sample holder includes a cylindrical holder outer cylinder, a sample holding section that is connected to one end of the holder outer cylinder and holds the sample, a gas reservoir tank that is connected to another end of the holder outer cylinder and stores gas, an orifice for ejecting the gas stored in the gas reservoir tank into the holder outer cylinder, and a valve for controlling a flow of the gas stored in the gas reservoir tank into the orifice, the sample holding section has an open end for discharging the gas supplied from the gas reservoir tank and having passed through the sample,
• the electron microscope system includes an electron microscope including a column that includes an electron optical system and in which the sample holder is inserted from a side surface of the column, a valve drive power source, and a control computer that controls the valve drive power source,
• the sample observation method comprising:
• causing the control computer to transmit, to the valve drive power source, a pulse control signal for controlling an opening degree of the valve at a time of the observation of the sample;
• and
• causing the valve drive power source to control the opening and closing of the valve to supply pulsed gas to the sample in response to the pulse control signal.