Stage device, charged particle beam apparatus, and vacuum apparatus
AssigneeHitachi High-Tech Corporation
InventorsMotohiro Takahashi, Masaki Mizuochi, Raifu Yamamoto, Yasuhiro Ando
Life of this patent
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Abstract
A stage device is disposed in a vacuum environment and moves a target placed on the stage device, the stage device including: a guide rail that is laid on a base; a carriage that moves along the guide rail; rolling elements that come into contact with the guide rail and the carriage and rotate along with the movement of the carriage; a table that is connected to a part of the carriage and moves along with the carriage; and a blocking cover that is provided to cover a normal direction of a guide surface of the guide rail and blocks foreign matter scattered from the guide rail, the carriage, or the rolling elements.
Claims13
A stage device that is disposed in a vacuum environment and moves a target placed on the stage device, the stage device comprising:
- a base including a groove portion recessed within a portion of the base;
- a guide rail positioned within and fixed to the groove portion, the guide rail including an upper guide surface;
- a carriage positioned within the groove portion and moves along the guide rail;
- rolling elements that come into contact with the guide rail and the carriage and rotate along with the movement of the carriage;
- and
- a base table that is connected to a part of the carriage and moves along with the carriage,
- wherein a bottom portion of the groove portion is provided to completely cover a normal direction of the upper guide surface and blocks foreign matter scattered from the guide rail, the carriage, or the rolling elements.
Dependencies are inferred from the claim text.