Work cleaning device and cleaning method
AssigneeNHK Spring Co., Ltd.
InventorEijiro Furuta
Life of this patent
Estimating the term…
Abstract
A cleaning device includes a support member supporting a suspension as a work, first piezoelectric elements arranged on the suspension, second piezoelectric elements arranged on the suspension, an oscillation signal generator and a blowing suction unit. The oscillation signal generator applies an oscillation signal to at least one of the piezoelectric elements and the second piezoelectric elements. A gas such as air is blown onto the suspension and a gas around the suspension is sucked by the blowing suction unit in a state where at least one of the piezoelectric elements is oscillated by the oscillation signal.
Claims7
A cleaning device for cleaning a work, the work comprising (i) an actuator mount portion on which piezoelectric elements are mounted and (ii) a conductive circuit portion conductive with the piezoelectric elements, and the cleaning device comprising:
- a support member for supporting the work;
- an oscillation signal generator configured for outputting an oscillation signal to the piezoelectric elements through the conductive circuit portion;
- a power supply connecting unit configured for electrically connecting and disconnecting the oscillation signal generator with the conductive circuit portion, the power supply connecting unit comprising a probe unit which is separable from the conductive circuit portion and which contacts with the conductive circuit portion in a state where the work is cleaned;
- a driving mechanism which moves the probe unit between a first position where the probe unit is brought into contact with the conductive circuit portion and a second position where the probe unit is separated from the conductive circuit portion;
- and
- a gas ejection mechanism blowing a gas onto the work in a state where the piezoelectric elements are oscillated by the oscillation signal.
A cleaning method of cleaning a work in a gas, the method comprising steps of:
- providing a work comprising (i) an actuator mount portion on which piezoelectric elements are mounted and (ii) a conductive circuit portion conductive with the piezoelectric elements,
- providing a cleaning device comprising:
- a support member for supporting the work;
- an oscillation signal generator configured for outputting an oscillation signal to the piezoelectric elements through the conductive circuit portion;
- a power supply connecting unit configured for electrically connecting and disconnecting the oscillation signal generator with the conductive circuit portion, the power supply connecting unit comprising a probe unit which is separable from the conductive circuit portion and which contacts with the conductive circuit portion in a state where the work is cleaned;
- a driving mechanism which moves the probe unit between a first position where the probe unit is brought into contact with the conductive circuit portion and a second position where the probe unit is separated from the conductive circuit portion;
- and a gas ejection mechanism blowing a gas onto the work in a state where the piezoelectric elements are oscillated by the oscillation signal
- supporting the work to which the piezoelectric elements are attached;
- oscillating the piezoelectric elements and oscillating the work by applying an oscillation signal to the piezoelectric elements;
- and
- blowing a gas onto the work in a state where the work is oscillated.
Dependencies are inferred from the claim text.