Vibration determination in substrate processing systems
AssigneeApplied Materials, Inc.
InventorsZhi Wang, Tao Zhang, Punyabrahma Panda, Michael Kutney
Life of this patent
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Abstract
A method includes receiving, by a processing device, position error data from one or more motors of a process chamber. The method further includes performing preprocessing of the position error data. The method further includes transforming the position error data to a frequency domain. The method further includes determining, based on the frequency domain position error data, that a vibration fault has occurred in connection with the process chamber. The method further includes performing a corrective action in view of the vibration fault.
Claims20
A method, comprising:
- receiving, by a processing device, position error data from one or more motors of a substrate support stage of a substrate processing apparatus;
- performing preprocessing of the position error data to generate preprocessed position error data;
- applying a filter to the preprocessed position error data to generate filtered position error data;
- determining, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus;
- and
- performing a corrective action in view of the vibration fault.
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- receiving position error data from one or more motors of a substrate support stage of a substrate processing apparatus;
- performing preprocessing of the position error data to generate preprocessed position error data;
- applying a filter to the preprocessed position error data to generate filtered position error data;
- determining, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus;
- and
- performing a corrective action in view of the vibration fault.
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is configured to:
- receive position error data from one or more motors of a substrate support stage of a substrate processing apparatus;
- perform preprocessing of the position error data to generate preprocessed position error data;
- apply a filter to the preprocessed position error data to generate filtered position error data;
- determine, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus;
- and
- perform a corrective action in view of the vibration fault.
Dependencies are inferred from the claim text.