Methods of mitigating crosstalk in metrology images
AssigneeASML Netherlands B.V.
InventorsRobin Daniel Buijs, Willem Marie Julia Marcel Coene
Life of this patent
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Abstract
Disclosed is a method of determining an orthonormalized structure of interest reference image, the orthonormalized structure of interest reference image for applying to a measured image of the structure of interest to correct for the effect of crosstalk from at least one nuisance structure. The method comprises determining a structure of interest reference image based on knowledge of the structure of interest; determining at least one nuisance structure reference image based on knowledge of the at least one nuisance structure; and orthonormalizing the structure of interest reference image to the at least one nuisance reference image to obtain the orthonormalized structure of interest reference image.
Claims15
A method of determining an orthonormalized structure of interest reference image, the orthonormalized structure of interest reference image configured to be applied to a measured image of the orthonormalized structure of interest to correct for effect of crosstalk from at least one nuisance structure, the method comprising:
- determining a structure of interest reference image based on knowledge of the structure of interest;
- determining at least one nuisance structure reference image based on knowledge of the at least one nuisance structure;
- and
- orthonormalizing the structure of interest reference image to the at least one nuisance structure reference image to obtain the orthonormalized structure of interest reference image.
Dependencies are inferred from the claim text.