Film formation apparatus, film formation method, imprinting apparatus, planarization apparatus, and article manufacturing method

A film formation method of forming a film of a curable composition in a space between a substrate and a mold by pressing the mold on the curable composition dispensed onto the substrate, the film formation method comprising:

• a dispensing step dispensing a liquid mixture in which the curable composition and a predetermined solvent are mixed onto the substrate or the top surface of the curable composition;
• a division step of generating a plurality of sub spaces by dividing the space between the substrate and the mold;
• and
• a control step of performing control such that a first operation of applying the liquid mixture and a second operation of volatilizing the solvent included in the liquid mixture are performed in the order of the first operation and the second operation according to the number of sub spaces generated in the division step,
• wherein the division step divides the space between the substrate and the mold with a plane parallel to opposite surfaces of the substrate and the mold.

A film formation method of forming a film of a curable composition in a space between a substrate and a mold by pressing the mold on the curable composition dispensed onto the substrate, the film formation method comprising:

• a dispensing step dispensing a liquid mixture in which the curable composition and a predetermined solvent are mixed onto the substrate or the top surface of the curable composition;
• a volatilization step of volatilizing the solvent included in the liquid mixture;
• and
• a division step of generating a plurality of sub spaces by dividing the space between the substrate and the mold,
• wherein the dispensing step and the volatilization step are performed according to the number of times corresponding to the number of sub spaces generated in the division step, and the volatilization step is performed after the dispensing step has been completed, and
• wherein the division step divides the space between the substrate and the mold with a plane parallel to opposite surfaces of the substrate and the mold.

An imprinting apparatus configured to form a pattern of a curable composition in a plurality of pattern formation areas on a substrate by pressing a mold including a patterned part on the curable composition dispensed to the substrate, the imprinting apparatus comprising:

• a dispenser configured to apply a liquid mixture in which the curable composition and a predetermined solvent are mixed onto the substrate or the top surface of the curable composition;
• and
• a controller configured to generate a plurality of sub spaces by dividing the space between the substrate and the mold,
• wherein the controller performs control such that a first operation of applying the liquid mixture and a second operation of volatilizing the solvent included in the liquid mixture are performed in the order of the first operation and the second operation according to the number of sub spaces, and
• wherein the controller divides the space between the substrate and the mold with a plane parallel to opposite surfaces of the substrate and the mold.

A planarization apparatus configured to form a flattening film of a curable composition on a substrate by pressing a mold including a planar part on the curable composition dispensed to the substrate, the planarization apparatus comprising:

• a dispenser configured to apply a liquid mixture in which the curable composition and a predetermined solvent are mixed onto the substrate or the top surface of the curable composition;
• and
• a controller configured to generate a plurality of sub spaces by dividing the space between the substrate and the mold,
• wherein the controller performs control such that a first operation of applying the liquid mixture and a second operation of volatilizing the solvent included in the liquid mixture are performed in the order of the first operation and the second operation according to the number of sub spaces, and
• wherein the controller divides the space between the substrate and the mold with a plane parallel to opposite surfaces of the substrate and the mold.

An article manufacturing method using a film formation apparatus configured to form a film of a curable composition in a space between a substrate and a mold by pressing the mold on the curable composition dispensed onto the substrate, the film formation apparatus including:

• a dispenser configured to apply a liquid mixture in which the curable composition and a predetermined solvent are mixed onto the substrate or the top surface of the curable composition;
• and
• a controller configured to generate a plurality of sub spaces by dividing the space between the substrate and the mold,
• wherein the controller performs control such that a first operation of applying the liquid mixture and a second operation of volatilizing the solvent included in the liquid mixture are performed in the order of the first operation and the second operation according to the number of sub spaces, and wherein the controller divides the space between the substrate and the mold with a plane parallel to opposite surfaces of the substrate and the mold,
• wherein the article manufacturing method comprises:
• a film forming step of forming the film of the curable composition in the space between the substrate and the mold using the film formation apparatus;
• a processing step of processing the substrate on which the film has been formed in the film forming step;
• and
• a step of manufacturing an article from the substrate processed in the processing step.