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US 12,710,681 B2Granted
Light modulation element, beam steering device including the same, and electronic device including beam steering device
AssigneeSamsung Electronics Co., Ltd.
InventorsDuhyun Lee, Sunil Kim, Junghyun Park, Changgyun Shin, Byunggil Jeong
Life of this patent
Estimating the term…
Abstract
Provided is a light modulation element including a first contact layer, a second contact layer, an active layer provided between the first contact layer and the second contact layer, a first contact plug provided between the first contact layer and the active layer, and a second contact plug provided between the second contact layer and the active layer, wherein a width of at least one of the first contact plug and the second contact plug is less than a width of the active layer.
Claims34
A light modulation element comprising:
- a first contact layer;
- a second contact layer;
- an active layer provided between the first contact layer and the second contact layer in a vertical direction;
- a first contact plug provided between the first contact layer and the active layer in the vertical direction;
- a second contact plug provided between the second contact layer and the active layer;
- and
- a first insulation film provided between the first contact layer and the active layer in the vertical direction and adjacent to the first contact plug in a horizontal direction,
- wherein a width of the first contact plug and a width of the second contact plug is less than a width of the active layer in the horizontal direction.
5 more elements
A beam steering device comprising:
- a first light modulation element;
- and
- a second light modulation element,
- wherein each of the first light modulation element and the second light modulation element comprises:
- a first contact layer;
- a plurality of nanostructures provided on the first contact layer in a vertical direction;
- and
- a plurality of second contact layers respectively provided on the plurality of nanostructures in the vertical direction,
- wherein each of the plurality of nanostructures comprises a first contact plug, an active layer provided on the first contact plug, and a second contact plug provided on the active layer,
- wherein a first insulation film is provided between the first contact layer and the active layer in the vertical direction and adjacent to the first contact plug in a horizontal direction, and
- wherein a width of the first contact plug and a width of the second contact plug is less than a width of the active layer in the horizontal direction.
8 more elements
An electronic device comprising:
- a light source configured to emit light;
- a beam steering device configured to adjust a traveling direction of the light emitted from the light source and direct the light to an object;
- a sensor configured to receive light reflected from the object that is irradiated by the light;
- and
- a processor configured to analyze the light received by the sensor,
- wherein the beam steering device comprises a first light modulation element and a second light modulation element,
- wherein each of the first light modulation element and the second light modulation element comprises:
- a first contact layer;
- a plurality of nanostructures provided on the first contact layer in a vertical direction;
- and
- a plurality of second contact layers respectively provided on the plurality of nanostructures in the vertical direction,
- wherein each of the plurality of nanostructures comprises a first contact plug, an active layer provided on the first contact plug, and a second contact plug provided on the active layer,
- wherein a first insulation film is provided between the first contact layer and the active layer in the vertical direction and adjacent to the first contact plug in a horizontal direction, and
- wherein a width of the first contact plug and a width of the second contact plug is less than a width of the active layer in the horizontal direction.
11 more elements
Dependencies are inferred from the claim text.