Waveguide structure and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuan-Neng Chen, Feng-Wei Kuo, Min-Hsiang Hsu, Lan-Chou Cho, Chewn-Pu Jou, Wen-Shiang Liao
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuan-Neng Chen, Feng-Wei Kuo, Min-Hsiang Hsu, Lan-Chou Cho, Chewn-Pu Jou, Wen-Shiang Liao
Estimating the term…
An optical attenuating structure is provided. The optical attenuating structure includes a substrate, a waveguide, doping regions, an optical attenuating member, and a dielectric layer. The waveguide is extended over the substrate. The doping regions are disposed over the substrate, and include a first doping region, a second doping region opposite to the first doping region and separated from the first doping region by the waveguide, a first electrode extended over the substrate and in the first doping region, and a second electrode extended over the substrate and in the second doping region. The first optical attenuating member is coupled with the waveguide and disposed between the waveguide and the first electrode. The dielectric layer is disposed over the substrate and covers the waveguide, the doping regions and the first optical attenuating member.
An optical attenuating structure, comprising:
An optical attenuating structure, comprising:
An optical attenuating structure, comprising:
Dependencies are inferred from the claim text.