Coupling mirror of an optical inspection system

A system for scanning a surface of an inspection object comprising:

• an illumination system providing an inspection light for illumination of a field of view (FOV) on said inspection object to produce a reflected light beam from said inspection object;
• an objective lens arrangement, located between said illumination system and said surface of said inspection object, the objective lens arrangement configured to:
• receive and transfer said inspection light to said inspection object;
• and
• collect light reflected off a plurality of field points on said inspection object to form and inwardly transmit said reflected light beam from the collected light;
• a light separator:
• having a reflective surface arranged:
• to direct said inspection light towards said FOV;
• and
• to receive and change a direction of brightfield light comprising a central portion of said reflected light beam;
• and
• sized and shaped to allow therearound darkfield light comprising a peripheral portion of said reflected light beam;
• and
• a holder configured to provide mechanical support to said light separator, having a first portion attached to said light separator and a second portion extending away from said light separator.