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US 12,710,602 B2Granted
Structures for a quantum sensor
AssigneeGlobalFoundries U.S. Inc.
InventorNayden Petkov Nedev
Life of this patent
Estimating the term…
Abstract
Structures for a quantum sensor and methods of forming such structures. The structure comprises a first waveguide core, a second waveguide core, and a sensor layer laterally between the first waveguide core and the second waveguide core. The first waveguide core is laterally coupled to the sensor layer, the second waveguide core is laterally coupled to the sensor layer, and the sensor layer comprises a material including a plurality of defect centers capable of photoluminescence.
Claims20
A structure for a photonic device, the structure comprising:
- a first waveguide core;
- a second waveguide core;
- a sensor layer laterally between the first waveguide core and the second waveguide core, the first waveguide core laterally coupled to the sensor layer, the second waveguide core laterally coupled to the sensor layer, and the sensor layer comprising a material including a plurality of defect centers capable of photoluminescence;
- and
- a microwave source comprising an inductor that is positioned over the sensor layer, the inductor configured to generate microwave radiation,
- wherein the sensor layer has a first area, the inductor has a second area, and the second area is greater than or equal to the first area of the sensor layer.
3 more elements
A method of forming a structure for a photonic device, the method comprising:
- forming a first waveguide core and a second waveguide core;
- forming a sensor layer laterally between the first waveguide core and the second waveguide core;
- and
- forming a microwave source comprising an inductor that is positioned over the sensor layer,
- wherein the first waveguide core is laterally coupled to the sensor layer, the second waveguide core is laterally coupled to the sensor layer, the sensor layer comprises a material including a plurality of defect centers capable of photoluminescence, the inductor is configured to generate microwave radiation, the sensor layer has a first area, the inductor has a second area, and the second area is greater than or equal to the first area of the sensor layer.
2 more elements
Dependencies are inferred from the claim text.